Shock-induced nonlocal coupled thermoelasticity analysis (with energy dissipation) in a MEMS/NEMS beam resonator based on Green–Naghdi theory: A meshless implementation considering small-scale effects

ABSTRACT

In this article, a meshless method based on the generalized finite difference (GFD) method is developed for coupled thermoelsaticity analysis (with energy dissipation) considering small-scale effects in a micro-electromechanical-systems/nano-electromechanical-systems beam resonator. The Green–Naghdi theory of the generalized coupled thermoelasticity and nonlocal Rayleigh beam theory are utilized for dynamic analysis of a micro/nanobeam resonator subjected to thermal shock loading. The small-scale effects and energy dissipation are considered to derive the governing equations for both displacement and temperature fields. The governing equations are discretized in the Laplace domain using GFD method. To find the dynamic and transient behaviors of fields’ variables in time domain, an inversion Laplace technique is utilized, which is called the Talbot method. The effects of some parameters such as small-scale parameter and height of the micro/nanobeam on the dynamic behaviors of temperature and lateral deflection are discussed in detail.

KEYWORDS:

• Coupled thermoelasticity
• Green–Naghdi theory
• MEMS
• meshless method
• microbeam resonator
• nonlocal theory