The Effect of SF₆ on Ozone Generation using Dielectric Barrier Discharge

Abstract

This paper reports the results of an experimental study of effect of SF₆ on ozone generation within a Dielectric Barrier Discharge (DBD) fed by both pure oxygen and dry air. The chemical reaction mechanisms relevant to the process of ozone generation (and destruction) are discussed. The experimental results show the oxygen source should avoid the presence of SF₆ but the addition of a small amount of SF₆ in an air discharge can improve ozone concentration and ozone produce efficiency.

Keywords:

• Ozone
• Dielectric barrier discharge
• Ozone generation
• High frequency
• SF6
• Parallel-Plates
• Ozone Concentration
• Ozone-produced Efficiency

ACKNOWLEDGMENTS

The project was supported by the National Natural Science Foundation of China (No. 50476059), the Science & Technology Pillar Program of Jiangxi Province, China (No. 2009AE00100). The authors also like to thank Professor Cen Kefa and Assistant Professor Wang Zhihua.