Modelling of Electrical and Structural Properties of Thin Diamond Films

Abstract

The objective of this article is to add to the experimental understanding of the relationship between the electrical properties of diamond and the growth input and output parameters. A wide selection of thin polycrystalline CVD diamond is investigated using the impedance spectroscopy (IS) modelling technique. The films are analyzed in the as-grown and annealed states. As part of this task, the as-grown dc resistivity of the films is correlated to four growth output parameters: average grain size, full width half maximum (FWHM), diamond to graphite signal ratio, and growth parameter, . In addition, the ac properties are analyzed in terms of a developed ac circuit model. Also investigated in this study are the annealing and temperature effects on electrical conductivity and ac circuit model parameters for as-grown and annealed diamond films.

Key Words:

• Impedance spectroscopy modelling
• CVD diamond
• electrical properties
• structural properties
• growth parameters

Additional information

Notes on contributors

M.M. Bataineh

Mohannad M. Bataineh is an Assistant Professor of Electrical and Computer Engineering at the University of West Florida. Before joining the UWF, he worked as Visiting Assistant Professor at Michigan State University from 1998 through 2000. In August 2000 he joined the ECE faculty at the UF/UWF Joint Program in Electrical and Computer Engineering. His research interests include electronic materials characterization, device modelling, and opto-electronic device implementation. He received his BSEE degree from Yarmouk University in Jordan in 1987, his MSEE degree from Michigan State University in 1992, and his Ph.D. from Michigan State University in 1997.

S. Khatami

Saeid Khatami received his B.Sc. I degree from Western Michigan University in 1988, his M.Sc. degree from Michigan State University in 1992, and his doctorate from Michigan State University in 1997, all in electrical engineering. Since 1997 he has been working as a senior R&D engineer in MAXIM Integrated Products, Inc., working on design, simulation, fabrication, and testing of analog and mixed-signal projects such as high-speed bipolar, high-break-down BICMOS, high-speed BICMOS, SiGe-based bipolar, and high-Q inductors.

D.K. Reinhard

D.K. Reinhard is a Full Professor and Graduate Coordinator in the Department of Electrical and Computer Engineering at Michigan State University. His principle scholarly interests are in electronic and optical materials and devices, low-temperature deposition and development of optical quality diamond, optical applications of thin-film diamond, and application and synthesis of microstructures. Dr. Reinhard has published a number of research papers in leading journals and has contributed papers and presentations to national and international conferences. He had written a textbook on integrated circuit engineering that has been used by a number of engineering schools around the nation. He recently edited a handbook on diamond films with Dr. Jes Asmussen, Jr., published by Marcel Dekker Inc in 2001. Dr. Reinhard received his B.Sc. in electrical engineering from Purdue University in 1967, his M.Sc. in electrical engineering from MIT in 1968, and his Ph.D. in solid state electronics from MIT in 1973.

J. Asmussen

Jes Asmussen, Jr., is a Distinguished Full Professor of Electrical and Computer Engineering at Michigan State University and an IEEE Fellow. His research interests are in plasmas and plasma processing, microwave processing of materials, and ion and electrothermal thrusters. Dr. Asmussen has held several professional positions in academia as well as industry. He was the chairperson of the Electrical and Computer Engineering Department at Michigan State University from 1990–2000. Throughout his professional career, he published over 75 journal papers and contributed to over 160 national and international conferences and proceedings, and he holds 18 US patents. Dr. Asmussen has contributed chapters to at least five book publications and has written a number of technical reports and publications. He is a distinguished researcher in his field of studies. Dr. Asmussen received his B.Sc., M.Sc., and Ph.D. in electrical engineering from the University of Wisconsin-Madison in 1960, 1964, and 1967, respectively.