Capacitive micromachined ultrasonic focusing device for ultrasound applications

Abstract

This study applies constructive interference theory to investigate the behavior and performance of a capacitive micromachined ultrasonic focusing device (cMUFD). Via theory and numerical simulation this work demonstrates that this ultrasonic focusing device is superior to general acoustic devices in focal length and focal resolution of the constructive interference, especially in focal sound pressure (energy), which is five times that of a general acoustic device. The concentric rectangular cMUFD is microfabricated out of paper to measure radiation acoustic wave focal length and the radiation sound beam. Measurement results match the numerical theoretical calculations proving that use of the ultrasonic focusing device as an imaging device is feasible.

Key words:

• constructive interference theory
• capacitive micromachined ultrasonic focusing device
• focal resolution
• radiation pattern

Notes

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