Abstract
By combining silicon micromechanical techniques with surface functionalization, it is possible to realize MEMS (Micro-Electro-Mechanical system) systems for biological analysis. In this review, we summarize the working principle of a few selected MEMS bio-sensing devices. We also discuss the fabrication and operational aspects of such sensors and in particular immunosensors which employ the unique principle of antibody-antigen interaction. A complete overview of biological sensing using microcantilevers is presented.
Additional information
Notes on contributors
Abhay Porwal
Abhay Porwal is final year BTech student in the Department of Electrical Engineering, IIT Bombay. His final year research projects are on different aspects related to the development of a Bio-MEMS system for microcardial infarction.
Mayur Narsude
Mayur Narsude is final year BTech student in the Department of Electrical Engineering, IIT Bombay. His final year research projects are on different aspects related to the development of a Bio-MEMS system for microcardial infarction.
V Ramgopal Rao
V Ramgopal Rao obtained his MTech from IIT Bombay in 1991 and Dr-lng (magna-cum-laude) degree from the Faculty of Electrical Engineering, Universitaet der Bundeswehr Munich, Germany in May 1997. His doctoral thesis was on Planar-Doped-Barrier Sub 100 nm Channel Length MOSFETs. He was a DAAD (Deutscher Akademischer Austauschdienst/German-Academic-Exchange Service) fellow for three years during 1994–1996 and, during 1997–1998, and during the summer, 2000 a visiting scholar with the EE Department, University of California, Los Angeles. He is currently an Associate Professor in the Department of Electrical Engineering, IIT Bombay. Dr Rao's-areas of interest include ultra thin gate oxides and their reliability due to plasma and hot-carrier stress, high-k dielectrics, gate and channel engineering issues for deep sub-micron MOSFETs, novel devices, and Molecular Electronics. He has over 100 publications in these areas in refereed international journals and conference proceedings and holds one international and a European patent in the area of vertical MOSFETs. He closely interacts with various semiconductor industries in India and abroad and has many ongoing sponsored projects from various industries. He also collaborates with various research groups in Europe and USA. Prof Rao is a Senior Member of IEEE and a Fellow of IETE. He is closely associated with the IEEE activities in the Bombay region, and is currently the vice-chairman of the AP/ED Bombay chapter.
Soumyo Mukherji
Soumyo Mukherji received his BTech Degree in Instrumentation from IIT-Kharagpur, MS in Mechanical Engineering from Colorado State University (Fort Collins, USA) and PhD in Biomedical Engineering from University of North Carolina (Chapel Hill, USA). He is currently working in Biomedical Engineering, Indian Institute of Technology, Bombay as an Assistant Professor. His research interests include sensors including biosensors, cardiac electrophysiology (ischemia related sudden cardiac death) and telemedicine. He has worked extensively in characterizing and modeling electrophysiological and ionic changes associated with acute myocardial ischemia. He is a member of BMES (USA), IEEE and BMESI (India).