![Sample our Engineering & Technology journals, sign in here to start your access, latest two full volumes FREE to you for 14 days]({"type":"image" , "src" : "/sda/5933/TOC-Subject-Sample-2021-Engineering-Tech.jpg"})
Abstract
a-C/(AlCrWTaTiNb)CxNy composite films are deposited by a magnetron sputtering technique using a carbon and mosaic target. The effect of carbon target power on chemical composition, morphology, microstructure and mechanical properties of a-C/(AlCrWTaTiNb)CxNy composite films is investigated. It is found that a multi-element nitride (AlCrWTaTiNb)Nx film prepared without the carbon target demonstrates a triangle shape morphology with two-phase face-centred cubic structure (FCC). The crystallographic structure of the composite films changes into single-phase FCC and the morphology into granular when the carbon target power is in the range of 50–150 W. The preferred orientation of the composited films changes from (220) without the carbon target to (111) introducing carbon atoms. The maximum of micro-hardness and elastic modulus of a-C/(AlCrWTaTiNb)CxNy composite films deposited at 100 W carbon target power are 23 and 290 GPa, respectively. A corresponding H3/E2 value reflecting film frictional characteristics also reaches a maximum of 0·147.
Acknowledgements
The project is financially supported by Major Project of Chinese National Programs for Fundamental Research and Development (No. 2011CB013402), State Key Laboratory for Mechanical Behavior of Materials (No. 20121210), National Natural Science Foundation of China (Grant No. 11204024), Educational Committee Foundation of Liaoning Province (L2012475), Technology Foundation for Selected Overseas Chinese Scholar (Ministry of Human Resources and Social Security of the People’s Republic of China) and the Fundamental Research Funds for the Central Universities (Grant No. DC201502080406).