Structural and optical properties of anodic orthorhombic zirconia films

ABSTRACT

Twenty to eighty nanometre thick zirconia (ZrO₂) films were formed by anodisation of zirconium metal in 10% oxalic acid in the potential range of 10–30 V. Grazing-incidence X-ray diffraction measurement revealed the formation of orthorhombic ZrO₂. X-ray photo electron spectroscopy confirmed the formation of nearly stoichiometric ZrO₂ at 20 V. Ellipsometric measurement across the visible spectral band derived the value of refractive index of ZrO₂ films in the range of 2.02–2.2.

KEYWORDS:

• Orthorhombic zirconia
• anodisation
• thin films
• optical properties

Disclosure statement

No potential conflict of interest was reported by the authors.