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Abstract
The behavior of charged bio polymer micro particles when deposited onto a CMOS chip can be analytically modeled in form of the incompressible Navier-Stokes equation and the electrostatic Poisson equation, as we describe in this article. Based on these models, numerical simulations of depositions can be implemented in COMSOL that lead to improvements in the experimental setup, optimizing the size and charge distribution of the micro particles. Adapting the experiments according to the simulation results, we will show the powerful gain in deposition precision, which is essential for a contamination-free deposition and hence high quality combinatorial deposition.
Acknowledgments
The authors would like to thank V. Stadler, T. Felgenhauer, and K. Leibe for helpful discussions and D. Rambow, S. Heß, and J. Kretschmer for technical assistance. The aerosol generator was built in cooperation with the company R.O.T GmbH (Germany). The financial support by the Baden-Württemberg Stiftung is gratefully acknowledged.
