Multifractal Analysis of Airborne Microcontamination Particles

Abstract

Highly fluctuating time-series of airborne particle counts, obtained in an industrial cleanroom environment, are analyzed using the concept of multifractal theory. This is done by transfering the irregular time-series into an α-f(α) plot, thereby permitting a comparison of different sensors and time periods. The long-term objective of the analysis is to detect changes in the cleanroom environment that could be of significance for the quality of the microchip production. The multifractal analysis is based on the Legendre and on the canonical methods.