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Abstract
Using BaTiO3 based Z5U material and silver-palladium internal electrode, multilayer ceramic capacitors (MLC) were fabricated. The MLC had 24 effective dielectric layers, thickness of one layer was about 20 μm and the capacitance was 0.1 μF. Formation of green chips, binder burnout, sintering, terminations of electrode were described. Internal structure showed no de-lamination between electrode/dielectric interfaces. Surface microstructure of dielectrics depicted average grain size of about 6–7 μm. Temperature dependence of capacitances and tan δ were investigated. The MLC had very high resonant frequency ∼2.1 MHz and very low ESR ∼3.6 Ω.