ABSTRACT
The paper describes the design and construction of a laboratory model vacuum evaporation plant suited for thin film circuits. The plant incorporates a multi-filament system and a substrate mask changer. Data on the stability and tolerance of thin film resistors and capacitors, deposited with the plant is presented. Details of a microcircuit having four resistors and two capacitors over a glass plate of ¾ × ¾ in. are given.