2
Views
0
CrossRef citations to date
0
Altmetric
Original Articles

On the Production of Diffused Layers in Germanium

Pages 327-335 | Received 29 Nov 1971, Published online: 21 Aug 2015
 

Abstract

Experimental studies are conducted for the diffusion of antimony in germanium in the following systems:

(1)

Sealed tube method, i.e. diffusion in a sealed vessel under vacuum.

(2)

Diffusion in a half-open system, by which the diffusant is carried over the wafer under vacuum.

(3)

Carrier gas diffusion (open system).

(4)

Diffusion with the powder method, by which the diffusion takes place in the solid phase using a powdered diffusant brought in direct contact with the wafer.

The final results are compared. It is found that the sealed tube system offers most advantages for the diffusion in germanium.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.