Abstract
Experimental studies are conducted for the diffusion of antimony in germanium in the following systems:
(1) | Sealed tube method, i.e. diffusion in a sealed vessel under vacuum. | ||||
(2) | Diffusion in a half-open system, by which the diffusant is carried over the wafer under vacuum. | ||||
(3) | Carrier gas diffusion (open system). | ||||
(4) | Diffusion with the powder method, by which the diffusion takes place in the solid phase using a powdered diffusant brought in direct contact with the wafer. |
The final results are compared. It is found that the sealed tube system offers most advantages for the diffusion in germanium.