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Abstract
Experimental studies are conducted for the diffusion of antimony in germanium in the following systems:
| (1) | Sealed tube method, i.e. diffusion in a sealed vessel under vacuum. | ||||
| (2) | Diffusion in a half-open system, by which the diffusant is carried over the wafer under vacuum. | ||||
| (3) | Carrier gas diffusion (open system). | ||||
| (4) | Diffusion with the powder method, by which the diffusion takes place in the solid phase using a powdered diffusant brought in direct contact with the wafer. | ||||
The final results are compared. It is found that the sealed tube system offers most advantages for the diffusion in germanium.