Fabrication and Measurements of a Surface Elastic Wave Amplifier

Abstract

Monolithic type surface acoustic wave amplifiers were fabricated. These employ the interaction between carriers drifting in a semiconductor film and electric fields accompanying a Rayleigh wave propagating on piezoelectric substrates. The experimental devices were fabricated in vacuum by flash evaporation of In Sb compound onto quartz substrates on which inter digital transducer patterns were made using photolithography techniques. Measurements of delay and gain were made.

Indexing Terms:

• Ultrasonics
• Surface Wave Devices