Material Interaction Problems in Semiconductor Devices & Integrated Circuits

Abstract

Two major material interaction problems in the semiconductor devices and integrated circuits ‘purple plague’ and ‘electromigration’ have been discussed in this paper. Illustrations are given with scanning electron micrographs.

Indexing Terms:

• Purple Plague
• Electromigration
• Failure Analysis
• Scanning Electron Microscope
• Metallization
• Thermocompression Bonding