A Novel Process Simulator for Rapid Thermal Oxidation: RAPIDOX

Abstract

The present paper describes the process simulator (RAPIDOX) developed for simulation of Rapid Thermal Oxidation (RTO). Various process simulators are available like SUPREM-II and SUPREM-III. But none of these simulators include models for RTO since these simulators were developed before the emergence of RTO technique. This stresses the need to develop a process simulator specially for RTO.

A detailed review regarding the experimental efforts and various modelling attempts was carried out. Based on this, ten models were selected and included in RAPIDOX.

RAPIDOX consists of six modules. This paper includes description of complete structure of the package along with the description of each module in it. Results obtained from the package are included at the end along with a critical discussion.

Indexing terms:

• Rapid thermal Oxidation
• Simulator
• RAPIDOX