Tin Oxide Film Deposition and Characterization for a Chemoresistive Gas Sensor

ABSTRACT

The proposed work studies the synthesis, structural, and sensitivity of tin oxide films deposited by sputtering for a gas sensor. This includes an analysis of a tin oxide film doped with noble metal palladium. Gas sensitivity of the deposited layer is analysed as per the deposition parameters such as the thickness of the film, substrate temperature, argon–oxygen ratio of the sputtering environment, and duration and doping metal weight percentage into the tin oxide films and the results obtained are explained.

KEYWORDS:

• Characterization
• sensitivity
• thin film deposition

Acknowledgments

The authors acknowledge the facilities in the Center of Excellence in Nanoelectronics at IISc.

Additional information

Funding

The authors are thankful to the Department of Science and Technology, Ministry of Information and Communication Technology [grant number IDP/MED/2012/6], which has provided the funds for setting up this facility at IISc. They also thank b-smart for funding through a sponsored project.

Notes on contributors

G. Velmathi

G. Velmathi is currently working as a professor in the School of Electronics Engineering in Vellore Institute of Technology University, Chennai. She received her PhD from the Indian institute of Science in the field of MEMS, gas sensor and VLSI design. She has two patents and a few awards, including a best teacher award, to her credit. She has two ongoing projects funded by DST for the benefits of disabled elderly.

E-mail: [email protected]

S. Mohan

S. Mohan is a former chairman of the Department of Instrumentation and Applied Physics, IISc. He is now working as a visiting faculty in the Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science. He has 23 completed and three ongoing projects of worth 300 crores to his credit. His area of research includes ultrathin oxide films for high k dielectrics for gate and DRAM applications, MEMS gas sensors, and shape memory microactuators. He has published more than 200 papers in peer-reviewed journals. He has won many awards, including the latest excellent Academic Award from the Prime Minister.

E-mail: [email protected]

Rabinder Henry

Rabinder Henry is a chief technology officer at Jampot Photonics. He was an associate dean-HOD and professor of the School of Interdisciplinary Science & Technology at IIT from 2006 to 2012. He holds MSc degrees in RF and microwave engineering, photonics, and medical systems from the Technical University of Dresden and University of Magdeburg. He has worked with Fraunhofer Institute for Photonics Microsystems, Institute for Electron Devices and Integrated Circuits, and Helmholtz-Zentrum Dresden-Rossendorf.

E-mail: [email protected].