Morphological Growth of Sputtered MoS₂ Films

Abstract

Sputtered MoS₂ films from 300 Å to 20,000 Å thick were deposited on metal and glass surfaces. The substrate effects such as surface temperature, finish, pretreatment, and chemistry as they affect the film formation characteristics were investigated by optical, electron transmission, electron diffraction, and scanning electron microscopy. Substrate temperature and surface chemistry were found to be the prime variables as to the formation of a crystalline or amorphous film. The friction characteristics are strictly influenced by the type of film formed. Surface chemistry and surface pretreatment account for compound formation and corresponding grain growth, which directly affect the adhesion characteristics, resulting in poor adherence. The type of surface finish (topography) as related to scratches, impurities, inhomogeneities, etc., are favorable nucleation sites for the growth of isolated and complex nodules within the film, and various complex surface overgrowths on the film. These nodular growth features have progressively more undesirable effects on the film behavior as the film thickness increases.

Presented as an American Society of Lubrication Engineers paper at the ASLE/ASME Lubrication Conference held in Miami Beach, Florida, October 21–23, 1975

Notes

Presented as an American Society of Lubrication Engineers paper at the ASLE/ASME Lubrication Conference held in Miami Beach, Florida, October 21–23, 1975