Abstract
The presence of a thin near-surface PE layer on LiNbO3 wafers formed through the incidental effect of water vapor has been found out. It was established that photoinduced surface destruction (PSD) af x−, y−cut LiNbO3:Fe was caused by proton diffusion in the space charge field of photostimulated electrons. The problem changing the physical properties of LiNbO3 crystals with the PE technique is discussed.