Growth of diamond thin film on tool materials from a gas phase

Jin Zengsun Institute of Atomic and Molecular Physics, Jilin University, Changchun, Jilin, 130023, China

Lu Xianyi Institute of Atomic and Molecular Physics, Jilin University, Changchun, Jilin, 130023, China

Huang Fuping Institute of Atomic and Molecular Physics, Jilin University, Changchun, Jilin, 130023, China

Zou Guangtian Institute of Atomic and Molecular Physics, Jilin University, Changchun, Jilin, 130023, China

Abstract

In the present paper, diamond films have been synthesized on tungsten carbide, sintered diamond and high pressure diamond by hot filament chemical vapour deposition method from the mixture gas of methane and hydrogen, and growth features of diamond were studied.

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Growth of diamond thin film on tool materials from a gas phase

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Growth of diamond thin film on tool materials from a gas phase

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