Design of a K-band two-layer microstrip interdigital filter exploiting aggressive space mapping

ABSTRACT

The auxiliary diagnosis and debugging of filters play an increasingly important role in the design of microwave filters, where aggressive space mapping (ASM) is one of the most commonly used debugging methods. This paper introduces ASM and designs a sixth-order two-layer microstrip interdigital filter with a center frequency of 20.4 GHz and a bandwidth of 1.6 GHz using ASM. The filter reached design indexes after seven iterations, which greatly reduces the number of simulations in the fine model, thereby saving time. It was fabricated with Micro-Electro-Mechanical Systems technology and the size of the chip is 7 mm × 3 mm × 0.8 mm. The measurement result was in good agreement with the simulation result.

KEYWORDS:

• Interdigital filter
• K-band
• two-layer
• aggressive space mapping (ASM)
• Micro-Electro-Mechanical Systems (MEMS)

Disclosure statement

No potential conflict of interest was reported by the authors.

Additional information

Funding

This work was supported by The National Key Research and Development Program of China Project [2017YFF0107206].

Notes on contributors

Xuanxuan Zhang

Xuanxuan Zhang was born in China in 1992. She received the B.Sc. degree from Harbin Institute of Technology in 2014. She is a Ph.D. candidate in the Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China. Her research interests include design and fabrication of microwave filters.

Qionghua Zhai

Qionghua Zhai received the M.Sc. degree in Instrument Science and Technology from the North University of China in 2016. Then she worked at the Institute of Microelectronics of Chinese Academy of Science until now. Her research interests include design and fabrication of semiconductor detectors.

Zhigang Li

Zhigang Li received the M.A.Sc. degree from Graduate University of Chinese Academy of Sciences in 2007 in Microelectronics. He joined the Institute of Microelectronics, Chinese Academy of Sciences, upon the completion of his M.A.Sc studies. He was a visiting scholar in Nanoelectronics Fabrication Facilities, Hong Kong University of Science and Technology from 2009 to 2010. His research area is MEMS base thermal imaging technique with optical readout.

Wen Ou

Wen Ou received his B.Sc. degree in physics from the University of Zhejiang, Hangzhou, China, in 1989 and M.Sc. degree in physics from University of Science and Technology of China, Hefei, China in 1992. He is currently a Professor in the Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China. His current research works focus on the areas of micro-electro-mechanical systems and complementary metal oxide semiconductor technology.

Yi Ou

Yi Ou received the B.Sc. and the Ph.D. degrees in physics from Beijing Institute of Technology (BIT), Beijing, China, in 1997 and 2003, respectively. From 2010 to 2011, he was a visiting scholar in Electronics and Computer Science, University of Southampton, UK. He is currently working in the Institute of Microelectronics, Chinese Academy of Science. His research interests include design and fabrication of micro-electro-mechanical systems (MEMS) sensors and actuators.