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Journal of Modern Optics Volume 48, 2001 - Issue 7

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Paper

Writing an arbitrary non-periodic pattern using interference lithography

S. Pau Bell Labs, Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ, 07974, USA E-mail: [email protected]

G. P. Watson Bell Labs, Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ, 07974, USA E-mail: [email protected]

O. Nalamasu Bell Labs, Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ, 07974, USA E-mail: [email protected]

Pages 1211-1223 | Received 18 Sep 2000, Published online: 03 Jul 2009

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Abstract

We propose a technique to write non-periodic patterns using interference lithography. Arbitrary patterns in one and two dimension are constructed by continuous scanning of multiple coherent sources at various incident angles and intensities.

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