Design of non-paraxial array illuminators by step-transition perturbation approach

Tuomas Vallius University of Joensuu, Department of Physics, PO Box 111, FIN-80101, Joensuu, Finland

Konstantins Jefimovs University of Joensuu, Department of Physics, PO Box 111, FIN-80101, Joensuu, Finland

Ville Kettunen Institute of Microtechnology, University of Neuchātel, Rue A.-L. Brequet 2, CH-2000, Neuchātel, Switzerland

Markku Kuittinen University of Joensuu, Department of Physics, PO Box 111, FIN-80101, Joensuu, Finland

Pasi Laakkonen University of Joensuu, Department of Physics, PO Box 111, FIN-80101, Joensuu, Finland

Jari Turunen University of Joensuu, Department of Physics, PO Box 111, FIN-80101, Joensuu, Finland

Abstract

We introduce an efficient Fourier-domain formulation of an approximate method to model non-paraxial diffractive elements. The method is based on evaluation of local field perturbations caused by abrupt surface-profile transitions. It facilitates fast parametric optimization of binary and four-level diffractive array illuminators in the non-paraxial domain of diffractive optics. Comparison with rigorous electromagnetic theory of gratings shows that optimization with the perturbation method gives accurate results if the smallest feature size in the surface profile is larger than one wavelength. Some binary designs are demonstrated using electron beam lithography.

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Design of non-paraxial array illuminators by step-transition perturbation approach

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Design of non-paraxial array illuminators by step-transition perturbation approach

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