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Original Articles

A modal model for diffraction gratings

Pages 1817-1834 | Received 10 Jan 2002, Published online: 03 Jul 2009
 

Abstract

A description of an algorithm for a rather general modal grating calculation is presented. Arbitrary profiles, depth, and permittivity are allowed. Gratings built up from sub-gratings are allowed, as are coatings on the sidewalls of lines, and arbitrary complex structure. Conical angles and good conductors are supported.

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