Full-batch-oriented scheduling algorithm on batch processing workstation of β₁→β₂ type with re-entrant flow

Abstract

This paper focuses on the scheduling problem of batch processing workstation (BPW) of β₁→β₂ type in semiconductor wafer fabrication (SWF). The constraints consist of incompatible families, limited waiting time, and re-entrant flow. BPW is a bottleneck in SWF. In order to ensure BPW that can process full-batch continuously, a new pull-based scheduling algorithm is proposed. According to collaborative strategy, the pull-based scheduling algorithm consists of three sub-algorithms. They are one-to-one forming batch sub-algorithm, two-to-one forming batch sub-algorithm, and pulling preceding jobs sub-algorithm. The experiments are implemented on a scheduling simulation platform of SWF. In the whole scheduling horizon, the three sub-algorithms are executed circularly. The results show that the proposed approach obtains better solutions.

Keywords:

• batch processing workstation
• re-entrant flow
• pull-based scheduling algorithm
• full-batch

Acknowledgement

This research was supported by University Provincial Natural Science Foundation of Anhui Province (KJ2016A057 and TSKJ2014B14), National Science and Technology Major Special Projects (2011ZX02501-005), and Shanghai Natural Science Foundation of China (13ZR1456400).

Disclosure statement

No potential conflict of interest was reported by the authors.

Additional information

Funding

This research was supported by University Provincial Natural Science Foundation of Anhui Province [KJ2016A057 and TSKJ2014B14], National Science and Technology Major Special Projects [2011ZX02501-005], and Shanghai Natural Science Foundation of China [13ZR1456400].