Abstract
The recent progress in inner surface hardening of tubes by plasma processing is summarized. Several techniques of inner surface plasma source ion implantation and deposition are introduced, and their advantages and disadvantages are discussed. The basic principles, technical features and new progress of inner surface plasma source ion implantation methods for metal tubes, which were developed in our laboratory, are described in detail. And perspectives of the future technical development for inner surface ion implantation of tubes are presented.
* Supported by National Natural Science Foundation of China (Grant Nos. 50071068 and 10275088), National High Technology Research and Development Program of China (Grant No. 2002A331020), ARO-FE of USA (Grant No. N62649-02-1-0010), and Science and Technology Program of Beijing Municipal Science and Technology Commission (Grant No. H020420160130)
Notes
* Supported by National Natural Science Foundation of China (Grant Nos. 50071068 and 10275088), National High Technology Research and Development Program of China (Grant No. 2002A331020), ARO-FE of USA (Grant No. N62649-02-1-0010), and Science and Technology Program of Beijing Municipal Science and Technology Commission (Grant No. H020420160130)