VEHICLE ANAGEMENT OF AMHS IN 300MM WAFER FAB

ABSTRACT

In this paper, a vehicle management framework for connecting transport of automated material handling system (AMHS) in 300mm wafer fab, which integrates the interbay and intrabay systems, is proposed. Based on operational area of vehicles, we extend our previous study and propose “vehicle type” concept for vehicle management in the AMHS. Three types of vehicle management scheme are analysed and discussed, in order to assign vehicles flexibly and improve performance of transport environment. These include 1) fixed vehicle type, 2) virtual vehicle type, and 3) dynamic vehicle type.

Keywords:

• wafer fabrication
• AMHS
• interbay
• intrabay