以限制理論爲基礎之晶圓製造廠派工法則

摘要

本硏究將晶圓製造廠依特性分成瓶頸機台、非瓶頸機台與成批加工機台，分別提出不同的管理方式。對於瓶頸機台，維持其最高有效使用率以達到系統最大產出；對於非瓶頸機台，則應充分協助供貨給瓶頸機台，並使自己不致成爲瓶頸機台；成批加工機台則在保護瓶頸機台與節省整備時間之間取得平衡。這些法則被建立成一套可依現場狀況訂定及修正工件加工優序値的自動化工具，經實際晶圓廠的模擬模式結果顯示，以限制理論爲基礎的派工法則適合推廣於晶圓製造廠。

Abstract

This paper demonstrates how the concept of the Theory of Constraints can be used to improve control of semiconductor manufacturing processes. The concepts of the research reported herein are to maximize throughput by keeping the bottleneck machine busy and to reduce average cycle time by proper management of the non-bottleneck machines. An automatic tool with a priority index has been developed to achieve this purpose. A simulation model with real world data is also established to examine the performance of the proposed method.

關鍵字:

• 晶圓製造
• 派工法則
• 限制理論
• 瓶頸機台

Keywords:

• Wafer Fabrication
• Dispatching Rule
• Theory of Constraints
• Bottleneck Station