Alphateilchenregistrierung bei der ¹⁹F(p, α γ) ¹⁶O-Kernreaktion mit 340-ke V-Protonen

Abstract

The alpha particle emission from the ¹⁹F(p, α γ)¹⁶O- nuclear reaction at the 340 keV resonance was investigated. Alpha particles with E_α = 1.72 MeV and a width of Г = 38 keV were found. The experimental energy value is in good agreement with theoretical considerations based on the reaction kinetics. For the quantitative determination of fluorine in the surface near region of silicon semiconductor wafers, a detection limit of ≲5 · 10¹³ F/cm² was confirmed due to the extremely low particle background.

Keywords:

• alpha spectroscopy
• fluorine 19
• layers
• nuclear reaction analysis
• proton reactions
• surfaces