Publication Cover
Numerical Heat Transfer, Part A: Applications
An International Journal of Computation and Methodology
Volume 68, 2015 - Issue 4
60
Views
3
CrossRef citations to date
0
Altmetric
Original Articles

Transient Behavior of Thin-Film Deposition: Coupling Micro- and Macro-Scale Transport

&
Pages 355-368 | Received 23 Jul 2014, Accepted 07 Nov 2014, Published online: 23 Apr 2015
 

Abstract

The transient behavior of the thin-film deposition process in a chemical vapor deposition reactor is numerically investigated, considering gallium nitride as the deposited material. The numerical modeling involves coupling of microscale transport mechanisms and chemical reactions at the surface with the macroscale convective heat and mass transfer. The results obtained provide a detailed understanding of the entire process, including the microscale phenomena at the surface. The study also presents information that can be used to control the system operating time and the consumption of input power and precursors, which are generally quite expensive.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.