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Abstract
A preconditioning compressible Navier-Stokes solver has been developed for microgroove flows. The pseudotime preconditioning with the rescaled AUSMD scheme is included to enhance convergence for the low-speed regime. The test cases contain flows through a two-dimensional microchannel and three-dimensional straight and spiral grooves. The calculations considering compressibility and rarefaction enhance numerical predictions. The nonlinearity of spanwise pressure gradients due to density variations is negated by the rarefaction. In addition, numerical estimation of pumping performance for a turbomolecular vacuum pump is strengthened by the inclusion of the spiral curvature effect.