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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 177, 2022 - Issue 7-8
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Articles

Observation of gamma radiation-induced defects in radiation-intolerant and radiation-tolerant Si/SiO2 by electron spins resonance and quantitative interpretation

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Pages 620-628 | Received 10 Nov 2021, Accepted 11 Apr 2022, Published online: 19 May 2022
 

Abstract

The gamma radiation-induced defects in radiation intolerant and radiation tolerant Si/SiO2 were observed by electron spin resonance (ESR). The Pb and È defects appeared in radiation-intolerant Si/SiO2 after radiation, but only Pb defects appeared in radiation-tolerant Si/SiO2 before and after radiation. The experimental results showed that these defects were correlated with the way of oxidation, the dosage of 60Co radiation and the electrical bias field during radiation. The higher the radiation dosage, the higher the defect concentration. A quantitative relationship was found between defect concentration and radiation dosage. Besides, the △B (peak to peak) of Pb and È indicated that Pb is the defect with a slow electron spin relaxation time, while È is the defect with a fast electron spin relaxation time. Finally, the experimental results are explained qualitatively.

Disclosure statement

No potential conflict of interest was reported by the author(s).

Additional information

Funding

The authors thank the funding support from National Natural Science Foundation of China (No. 61705091), Zhejiang Provincial Natural Science Foundation of China (No. LGG22F050002) and public welfare research project of Jiaxing City (No. 2022AY10029).

Notes on contributors

Xi Congling

Xi Congling received her MS degrees at the Department of Measurement Technology and Instrumentation of Xi'an Shiyou University in 2004. Her research interest is optical communication technology. She is an associate Professor in Jiaxing University.

Liu Changshi

Liu Changshi received his MS degrees from Shanghai Institute of Applied Physics, Chinese Academy of Sciences in 1987. His research interest is concerned with the effects radiation on materials. He is a professor of Jiaxing University.

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