Publication Cover
Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 108, 1989 - Issue 2-4
15
Views
7
CrossRef citations to date
0
Altmetric
Original Articles

Some of the current trends in the studies of sputtering

&
Pages 307-335 | Received 02 Jun 1988, Published online: 19 Aug 2006
 

Abstract

The main directions in experimental, theoretical and computer studies of sputtering of solids under ion bombardment are analyzed. It is emphasized that there is a close relation between these studies and practical applications of sputtering.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.