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Abstract
An observation of the surface structures of Fe-W alloy target irradiated by 27 keV Ar+ ions with a fluence of 1 × 1017/cm2 is carried out to investigate the surface topography effect on the sputtering angular distributions of individual elements. The angular distribution of sputtered Fe atoms is more outward-peaked than the cosine distribution. The found pit structures with an enriched Fe concentration may be one of the major causes of the deviation of the angular distribution of sputtered Fe atoms from Sigmund's theory.