Recoil implantation in carbon materials

Abstract

Based on the radiation cascade theory, the recoil yield has been calculated for different ion-film combinations often encountered in practice. Also, the recoil yield has been found as a function of film thickness and depth distribution or recoiling atoms in graphite. Then, by the Rutherford backscattering method the recoil yield and the depth of penetration of recoiling atoms in glassy carbon were determined experimentally. The parameters so found were compared with the theoretical data. Thereafter, the adhesion strength of tin, silver and molybdenum films on the surface of carbon materials was determined by the scratch test method, after the implantation of Ar⁺ ions (100 keV). An appreciable increase in the adhesion strength of these films was noticed. A relationship has been established between the increase in adhesion strength and the irradiation dose. The films of the used metals (tin and silver) which do not react chemically with carbon enabled us to explain the cause of increase in the adhesion strength. This increase is caused not by chemical bonding but by radiation enhanced mixing of the metal and carbon atoms.

Key Words:

• Recoil implantation
• carbon material
• radiation cascade
• adhesion