Calculations of the sputtering energy reflection coefficient for hydrogen plasma ion bombardment on carbon surfaces

Abstract

Monte Carlo calculations have been carried out for the sputtering energy reflection coefficient (Y _E ) of plasma ions incident on a carbon surface. The calculations incorporate a simulation of the velocity distribution of plasma ions incident on a surface with a floating potential. The average energy of an ion can increase by more than a factor of three as a result of this potential and the effect on Y _E can be significant. An analytic form for Y _E is constructed expressed in terms of the ion plasma temperature and the surface floating potential. The new model provides a fast and accurate means to calcualte Y _E .

Key Words:

• sputtering
• reflection
• plasma
• sheath
• surface
• interactions