The angular distributions of sputtered particles from nickel

Abstract

The angular distributions of sputtered particles for the 30 keV Ar-Ni combination have been experimentally studied using the collector technique. The distributions for the ion incidence angle in interval of 0°–80° relative to a surface normal were measured. The influence of both a direct ejection mechanism and collision cascade mechanism on the shape of these distributions has been discussed. The causes of difference between the shapes of the angular distributions of sputtered particles of nickel and the same distributions of copper are discussed too.

Key Words:

• sputtering
• Ni and Cu
• ion bombardment