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Abstract
The effect of irradiation with low energy argon ions (40 KeV, and fluences of 1015 to 1017 ions/cm2) on deposited thin films of Fe-30% Ni alloy was investigated using RBS and TEM techniques. The thickness of these films is about 65 ∓ 10 nm deposited on ceramic, KBr, and Be foils substrates. Gas bubble formation and profile distribution of the implanted argon ions were investigated. Formation of an ordered phase of Fe3Ni during irradiation appears to inhibit gas bubble formation.