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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 129, 1994 - Issue 3-4
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Section A: Radiation effects

Amorphization of p-implanted GaAs

J. Krynicki Institute of Nuclear Chemistry and Technology, Dorodna 16, 03–195, Warszawa, Poland; Institute of Nuclear Studies, Hoza 69, Warszawa, Poland
,
H. Rzewuski Institute of Nuclear Chemistry and Technology, Dorodna 16, 03–195, Warszawa, Poland; Institute of Nuclear Studies, Hoza 69, Warszawa, Poland
,
A. Turos Institute of Nuclear Chemistry and Technology, Dorodna 16, 03–195, Warszawa, Poland; Institute of Nuclear Studies, Hoza 69, Warszawa, Poland
&
R. Sidor Institute of Nuclear Chemistry and Technology, Dorodna 16, 03–195, Warszawa, Poland; Institute of Nuclear Studies, Hoza 69, Warszawa, Poland
Pages 141-145 | Received 11 May 1992, Published online: 19 Aug 2006
 
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Abstract

Amorphization of GaAs by P+ implantation at room temperature with fluences ranging from 2∗1014 to 1∗1015 cm−2 with energies ranging from 40 to 170 keV has been investigated by means of the RBS channelling technique. The critical dose and the critical energy density for amorphization were determined. The results obtained do not confirm the expected model of homogeneous amorphization for ‘light’ P-ion implantation.

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