Dislocation structure formation due to ion implantation

Abstract

A mechanism of dislocation structure formation and its dynamics is presented. Coalescence of the interstitial atoms leads to the formation of dislocation loops. The formed loops grow due to precipitation of the interstitial atoms. Interaction between loops results in their motion deep into material, where loops form a developed dislocation structure.

Key words:

• interstitial atoms
• dislocation loop
• dislocation structure