Cyclosilazanes and their Application as Precursors for Silicon-Based Ceramics

Abstract

The transformation of organo-element polymers into inorganic solids by pyrolysis of molecules is a new way to ceramic materials. The advantage of this method is that very pure compounds can be used, e.g. the pyrolysis of [Me₂Si-NH]₄ under NH₃ pressure above 1000°C gives α-Si₃N₄, Si₂N₂NH is characterized as microcrystalline material.

The present work reports the synthesis of a new type of precursor molecules for the ternary Si-B-N and the quaternary Si-B-C-N systems by coupling cyclosilazanes and borazines in different ratios.^[1]

Keywords::

• Cyclosilazanes
• Borazines
• Ring-coupling