Porous Silicon-Based Sensors: Prospects and Challenges

ABSTRACT

In this paper the various applications of porous silicon as sensors, namely vapor and pressure sensors, have been discussed. The advantages of the porous silicon sensors over existing sensors have also been indicated. Suitable signal conditioning schemes for porous silicon based sensors using discrete circuits and its corresponding FPGA implementation have been discussed. Finally, the challenges of commercialization of the porous silicon based sensors have also been highlighted.

Keywords:

• Contact problem
• Doping difficulty
• FPGA
• High resistivity
• Instability
• MEMS
• Nanocrystalline
• Nonuniformity
• Phase detection electronics
• Porous silicon
• Pressure sensors
• Signal conditioning
• SMART sensor
• Vapor sensors