![Sample our Physical Sciences journals, sign in here to start your FREE access for 14 days]({"type":"image" , "src" : "/sda/110819/TOC-Subject-Sample-2021-Physical-Sciences.jpg"})
FIB process parameters such as beam current, dwell time, and percentage overlap are optimized for the FIB milling of single crystal materials. Multiobjective optimization was carried out using Genetic Algorithm to maximize the material removal rate as well as to simultaneously minimize the surface roughness of the milled cavities. The optimized process parameters were used to make moulds that were further used for nanoreplication.
Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?
To request a reprint or corporate permissions for this article, please click on the relevant link below:
Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?
Obtain permissions instantly via Rightslink by clicking on the button below:
If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.
