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Abstract
BaTiO3 and SrTiO3 thin films were prepared by reduced-pressure metalorganic chemical vapor deposition. Ba(thd)2-di-tri, or Sr(thd)2, and Ti(OPr1)2-(thd)2 were dissolved in diglyme and were delivered by an aerosol-assisted non-contact vaporizer. Growth kinetics of the thin films was studied as a function of growth temperature, liquid source concentration and molar ratio of the metalorganic precursors. The mechanisms of composition control, crystallization and phase formation of the thin films were investigated over a wide range of stoichiometry.