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Abstract
A hybrid sol-gel approach is reported for the deposition of high-quality composite PZT films of the thickness 1 μm. In this approach, the metallo-organic sol-gel precursor solution is mixed with fine piezoelectric powders and dip-coated onto Pt/Ti/SiO2/Si substrates. Different organic viscous additives and deposition strategies were tried in order to deposit dense films with the properties approaching to those of bulk PZT. Using commercial PZT powder (TRS600FG) and ultrasonic mixing during deposition process, composite films having dielectric permittivity of ∼2500 and saturation polarization ∼35 μC/cm2 were obtained. These values are intermediate between bulk ceramics and conventional sol-gel PZT films and therefore are indicative of good piezoelectric properties.
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