Preparation of thick PZT films on stainless steel substrates

Abstract

Lead zirconate titanate (PZT, PbZr_0.52Ti_0.48O₃) films of thickness 22 μm have been deposited on stainless steel substrates by spin-coating a PZT solution containing PZT powder. The solution had a concentration of 1.2 M and was dispersed with PZT powder in a 1:1 powder/solution molar ratio. The films were rapidly heated to 400°C and annealed for 15 min, and then they were further annealed in an oven at 650°C for 30 min. The results of X-ray diffraction studies show that the films have a pure perovskite phase. The inter-diffusion of ions at the PZT/stainless steel interface was prevented by using a ZrO₂ barrier layer. The films were found to have good ferroelectric and piezoelectric properties.

Key Words:

• PZT
• Sol-Gel
• Thick Film
• Piezoelectricity