Structure, processing, and property relationships in tunable rf and microwave devices

Brady J. Gibbons Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM, 87545

Bae Ho Park Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM, 87545

Yongyu Gim Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM, 87545

Yan Fan Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM, 87545

Alp T. Findikoglu Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM, 87545

David W. Reagor Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM, 87545

Quanxi Jia Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM, 87545

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Abstract

Our work on tunable rf and microwave devices based on 90° off-axis magnetron sputtered Ba_0.6Sr_0.4TiO₃ epitaxial thin films is reviewed. In particular, we have studied the effects of energetic bombardment during deposition on the structural and electrical properties of these films. The fundamental result of changing the energetic bombardment conditions during deposition is to affect the stress/strain state of the films. We show that high bombardment conditions result in films with significantly extended out-of-plane lattice constants and depressed dielectric constants and tunabilities.

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Structure, processing, and property relationships in tunable rf and microwave devices

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Structure, processing, and property relationships in tunable rf and microwave devices

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