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Integrated Ferroelectrics
An International Journal
Volume 39, 2001 - Issue 1-4
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Section J: Materials and processing high frequency devices

Thickness dependent performance of Na0.5K0.5NbO3/sapphire thin film varactors

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Pages 403-410 | Received 14 Mar 2001, Published online: 03 Sep 2006
 

Abstract

Perfect c-axis oriented Na0.5K0.5NbO3 (NKN) films have been pulsed laser deposited on Al2O3(0112) single crystals (r-cut sapphire) for voltage tunable microwave device applications. Thickness dependence of dielectric performance of the NKN/sapphire interdigital capacitors (IDCs) has been studied. 40 V bias tunability and dielectric loss tan δ of 4 μm slot IDCs have been found to be 24.6 % and 2.86 % for 1.2 μm thick NKN film, and 6.1 % and 0.83 % for 0.14 μm thick NKN film, respectively. Low leakage currents and high breakdown voltages are observed in these structures.

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