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Integrated Ferroelectrics
An International Journal
Volume 36, 2001 - Issue 1-4
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Original Articles

Contribution to the low-temperature crystallization of pzt-based csd thin films

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Pages 163-172 | Received 14 Mar 2001, Published online: 19 Aug 2006
 

Abstract

In this work the nucleation and growth of PZT (Pb(Zr,Ti)O3) and PLZT ((Pb,La)(Zr,Ti)O3) thin films with high Ti content are studied. The optimisation of solution processing of alkoxy-alcohol route results in the crystallization of pure perovskite phase of PZT 30/70 and PLZT 5/30/70 after annealing at 400 °C. The films exhibit good functional response (PZT: Pr 33 μC/cm2 Ec 99 kV/cm ϵ 640 and tan δ 0.124).

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