Abstract
We realized excellent ferroelectric properties with sol-gel derived (Bi,La)4Ti3O12 (BLT) films by modifying dry gel structures just before the crystallization annealing. The dry gel structures were controlled by the oxygen pressure during baking process at 350°C. By this simple process, dried gel became very porous and thus crystallization mechanism was greatly enhanced. The maximum remanent polarization (Pr) of 27 μC/cm2 was achieved with an 80 nm BLT film. Although the Pr is greatly enhanced, the coercive field (Ec) was kept less than 55 kV/cm (Vc∼0.4 V). And, this film also shows the excellent fatigue property up to 1010 stress cycles.
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