Millimeter-Wave Loaded Line Ferroelectric Phase Shifters

Abstract

Ferroelectric loaded line phase shifters operating at millimeter waves for phased array antenna applications are presented. Phase shifters were manufactured on using Ba_0.3Sr_0.7TiO₃ thin films. The magnetron sputtering process was used to fabricate these Ba_0.3Sr_0.7TiO₃ ferroelectric films with a thickness ∼1 μm. The phase shifter operating at V-band (60 GHz) demonstrated continuous phase shift up to 220 deg and figure of merit (FOM) 22 deg/dB. The phase shifter operating at Ka-band (30 GHz) showed phase shift up to 360 deg and FOM 40 deg/dB.

Keywords:

• Phase shifters
• ferroelectric thin films
• tunable
• microwave devices